Abstract—Metal Oxide (MOx) semiconductor gas sensors typically operate at temperatures of few hundred Celsius degrees and consume hundreds of miliwatts of power. It is therefore, essential, to investigate the heat flux and power consumption in MOx sensors, especially designed for applications in battery-powered devices. The work presents the thermal and electrical investigations on LTCC substrates (Low Temperature Cofired Ceramic) as a base material for gas sensors. A novel shape of substrates with reduced heat capacity is showed. The sensor temperature was modulated with a pulsed heater voltage, therefore decreasing the average power consumption.
Index Terms—LTCC, gas sensors, thermal investigation, metal oxide.
Artur Rydosz, Wojciech Maziarz, and Tadeusz Pisarkiewicz are with the Electronic Department, AGH University of Science and Technology, Av. Mickiewicza 30, 30-059 Krakow, Poland (tel.: 0048-12-6173039; fax: 0048-12-633-23-98; e-mail: artur.rydosz@agh.edu.pl).
Heike Bartsch de Torres and Jens Mueller are with the IMN MacroNano, Technische Universität Ilmenau, Gustav-Kirchhoff-Str. 7, 98693 Ilmenau, Germany.
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Cite:Artur Rydosz, Wojciech Maziarz, Tadeusz Pisarkiewicz, Heike Bartsch de Torres, and Jens Mueller, "Thermal and Electrical Investigation on LTCC Gas Sensor Substrates," International Journal of Information and Electronics Engineering vol. 6, no. 3, pp. 143-146, 2016.
