Photolithographically Fabricated Sub-100 nm Silicon Slot Waveguide . International Journal of Information and Electronics Engineering, [S. l.], v. 2, n. 6, p. 859–861, 2012. Disponível em: https://www.ijiee.org/index.php/ijiee/article/view/486. Acesso em: 26 aug. 2026.