Thermal and Electrical Investigation on LTCC Gas Sensor Substrates
Keywords:
LTCC, gas sensors, thermal investigation, metal oxide.Abstract
Metal Oxide (MOx) semiconductor gas sensors
typically operate at temperatures of few hundred Celsius degrees and consume hundreds of miliwatts of power. It is therefore, essential, to investigate the heat flux and power consumption in MOx sensors, especially designed for applications in battery-powered devices. The work presents the thermal and electrical investigations on LTCC substrates (Low Temperature Cofired Ceramic) as a base material for gas sensors. A novel shape of substrates with reduced heat capacity is showed. The sensor temperature was modulated with a pulsed
heater voltage, therefore decreasing the average power
consumption.
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