Fabrication of Periodic 3D Nanostructuration for Optical Surfaces by Holographic Two-Photon-Polymerization
Keywords:
Two-photon polymerization, HTPP, nanostructures, electroless gold plating, light distribution, light extraction.Abstract
This study fabricated periodic 3D nanostructures
by using a periodic voxel array for light extraction. Two-photon polymerization (TPP) is a well-known technology used for generating complex 3D micro- and nanostructures with sub-100-nm resolution. Because of the periodic voxel-by-voxel array fabrication process, the fabrication of holographic two-photon polymerization (HTPP) can be faster than that of traditional TPP. HTPP promises a flexible technique to fabricate an arbitrary periodic 3D structured optical surface. In this research, we used a 25 × 25 beam-splitting holographic mask to generate a periodic focus in a photocured material and
to systematically fabricate complex 3D nanostructures at rates of mm² per minute. The optical responses of nanostructures with a 1 μm period fabricated in a polymer were characterized using 3D optical microscopy. The experimental results of the light
distribution demonstrated favorable agreement with those of the simulation. In the light-extracting experiment, the light extraction capability of the gold-layer nanostructures was 3.6 times higher than that of the glass without nanostructures.
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