Abstract—This study fabricated periodic 3D nanostructures by using a periodic voxel array for light extraction. Two-photon polymerization (TPP) is a well-known technology used for generating complex 3D micro- and nanostructures with sub-100-nm resolution. Because of the periodic voxel-by-voxel array fabrication process, the fabrication of holographic two-photon polymerization (HTPP) can be faster than that of traditional TPP. HTPP promises a flexible technique to fabricate an arbitrary periodic 3D structured optical surface. In this research, we used a 25 × 25 beam-splitting holographic mask to generate a periodic focus in a photocured material and to systematically fabricate complex 3D nanostructures at rates of mm² per minute. The optical responses of nanostructures with a 1 μm period fabricated in a polymer were characterized using 3D optical microscopy. The experimental results of the light distribution demonstrated favorable agreement with those of the simulation. In the light-extracting experiment, the light extraction capability of the gold-layer nanostructures was 3.6 times higher than that of the glass without nanostructures.
Index Terms—Two-photon polymerization, HTPP, nanostructures, electroless gold plating, light distribution, light extraction.
Yi-Hsiung Lee is with the Ph.D. Program of Electrical and Communications Engineering, Feng Chia University, Taichung 407, Taiwan (e-mail: andy955305@gmail.com).
Yi-Jui Liu is with Department of Automatic Control Engineering, Feng Chia University, Taichung 407, Taiwan (e-mail: erliu@fcu.edu.tw).
Patrice L. Baldeck is with University Grenoble, I/CNRS, LIPhy UMR 5588, Grenoble, F-38041, France (e-mail: baldeck@ujf-grenoble.fr).
Chih-Lang Lin is with Institute of Biomedical Engineering and Materials Science, Central Taiwan University of Science and Technology, Taichung 406, Taiwan (e-mail: cllin101943@ctust.edu.tw).
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Cite:Yi-Hsiung Lee, Yi-Jui Liu, Patrice L. Baldeck, and Chih-Lang Lin, "Fabrication of Periodic 3D Nanostructuration for Optical Surfaces by Holographic Two-Photon-Polymerization," International Journal of Information and Electronics Engineering vol. 6, no. 3, pp. 151-154, 2016.
