Abstract——In this paper, a three-axis piezoresistive accelerometer which has uniform resolutions at all axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor is made of a heavy proof mass and four long beams which allow us to obtain high resolutions. By reducing the resonant frequencies, uniform resolutions with small cross axis sensitivity could be designed. This kind of sensor was simulated successfully utilizing a finite element method supported by ANSYS software. The overall chip dimension of the sensor is 1.5×1.5×0.5 mm 3 and the uniform resolution can be at reached at 0.5 mg.
Index Terms—MEMS, accelerometer, piezoresistance, simulation, uniform resolution.
Tran Duc Tan is with the VNU University of Engineering and Technology, Vietnam (e-mail: tantd@vnu.edu.vn).
Cite: Tran Duc Tan, "Simulation and Design of a 3-DOF Piezoresistive Accelerometer with Uniform Resolution," International Journal of Information and Electronics Engineering vol. 3, no. 4, pp. 353-356, 2013.